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Regular version of the site

Book chapter

Исследование монокристаллического кремния методом рентгеновской топо-томографии в лабораторных условиях

С. 188-195.
Осадчая А. С., Асадчиков В. Е., Бузмаков А., Золотов Д., Смирнов И. С.

Silicon single crystals were studied by X-ray topo-tomography using laboratory sources. Experimental set up is described. Three-dimensional distribution of defect regions in the crystal were obtained.