Study of electrical properties of single GaN nanowires grown by molecular beam epitaxy
Electrical properties of single GaN nanowires grown by means of molecular beam epitaxy with Nplasma source were studied. Ohmic contacts connected to single ntype GaN wires were produced by the combination of electron beam lithography, metal vacuum evaporation and rapid thermal annealing technique. The optimal annealing temperature to produce ohmic contacts implemented in the form of Ti/Al/Ti/Au stack has been determined. By means of 2terminal measurement wiring diagram the conductivity of single NW has been obtained for NWs with different growth parameters. The method of MESFET measurement circuit layout of single GaN nanowires (NWs) has been developed. In accordance with performed numerical calculation, free carriers’ concentration and mobility of single NWs could be independently estimated using MESFET structure.