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End-to-end Mathematical Model of a Radio-Frequency Inductive Jet Discharge of Lowered Pressure

Journal of Engineering Physics and Thermophysics. 2024. Vol. 97. No. 2. P. 480–493.
Abdullin I. S., Zheltukhin V. S., A. Yu. Shemakhin

A self-consistent end-to-end model defining a radio-frequency inductive jet discharge of lowered pressure (13.3–133 Pa) in an undisturbed gas flow and in the presence of a solid body has been proposed. The model comprises three interrelated submodels defining the parts of such a discharge, participating in its interaction with the material treated: the plasma jet, the positive-charge layer formed in the neighborhood of the material, and the double electric layer directly near its surface. A peculiarity of the indicated discharge is that, in its plasma jet, a continuous-medium flow is changed to a free molecular flow, while the flow of charged particles in it satisfies the continuity hypothesis. Because of this, the gasdynamic parameters of the plasma jet are defined using the kinetic Boltzmann equation, the flow of charged particles in the jet and the positive-charge layer are considered in the hydrodynamic approximation, and the double electric layer formed near the surface of the material is defined using the model of a collisionless free molecular flow.

Research target: Physics Mathematics
Language: English
DOI
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Keywords: mathematical modelingsimulationsrf plasmalow pressuregas flow
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