Ge-Sb-Te based metasurface with angle-tunable switchable response in the telecom bands

Physical Review B: Condensed Matter and Materials Physics. 2023. Vol. 108. No. 8. Article 085127.

Solomonov A. I., Bochkarev M. E., Pavlov S. I., Lazarenko P. I., V. V. Kovalyuk, A. D. Golikov, G. N. Goltsman, Kozyukhin S. A., Dyakov S. A., Rybin M. V., Pevtsov A. B.

Metasurfaces based on phase change materials are widely used for the controllable on-demand modification
of properties of a device at the postfabrication stage. We report the fabrication of a switchable Ge-Sb-Te (GST)-based metasurface with a submicron period by magnetron sputtering with electron beam lithography postprocessing. We provide theoretical and experimentally measured angle-resolved reflection spectra of such metasurfaces. In these spectra, we observe magnetic dipole resonance features, which significantly differ for two different GST states, and Rayleigh anomalies, whose spectral position remains unchanged during the phase transition. We demonstrate the optical response of these metasurfaces to be strongly modulated under GST phase transition in the telecom wavelength range.

Keywords: metasurfaces, Phase change materials