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Calculations of ICRF Intermediate Pressure Plasma Flow with Influence of Non-Maxwellian EEDF

High Energy Chemistry. 2024. Vol. 58. No. 3. P. S416–S420.
Shemakhin A.Y,, Zheltukhin V. S., Shemakhin E. Y., Makeeva E. A.

The calculations by mathematical model of the RF plasma flow at a pressure of 13.3–133 Pa at Knudsen Kn⩽0.1 is performed. The model is based on Navier–Stokes equations together with the continuum model for electron and metastable components of the RF plasma taking into account non-maxwellian EEDF. Results of plasma flow calculations for electrons density, distributions of electron temperature and calculations of parameters of electromagnetic field are presented.

Research target: Mathematics Physics
Language: English
DOI
Text on another site
Keywords: calculationsICRF dischargeIntermediate PressurePlasma FlowNon-Maxwellian EEDF
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