Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow

Plasma Physics Reports. 2024. Vol. 50. No. 1. P. 89–100.

A. Yu. Shemakhin

The dependence of the parameters of low-pressure inductively coupled argon plasma (13.3–113 Pa) and field frequency of 13.56 MHz at the coil on the potential applied to the electrode and on gas flow rate up to 4000 sccm is numerically studied. The model is developed in the COMSOL Multiphysics environment and verified with experimental data, as well as over the Knudsen number. As a result of a numerical experiment, it is revealed as follows: when the displacement potential increases linearly, the density of charged particles increases exponentially and a slight increase in the electron temperature is observed; when the gas flow rate increases linearly, the density of charged particles increases exponentially, the density of excited states has an extremum at 2000 sccm, and the gas and electron temperature increases linearly.

Keywords: Mathematical simulation, COMSOL, inductively coupled plasma, ICRF discharge, combined RF discharge