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TCAD and SPICE Models for Account of Radiation Effects in Nanoscale MOSFET Structures
P. 2-8.
Two types of the MOSFET models available in commercial versions of TCAD and SPICE simulators are completed with additional equations taking into account radiation effects. The adequacy of the models is demonstrated on two examples 1) 0.2 um and 0.24 um SOI/DSOI MOSFETs considering TID effects and single heavy ion impact, and 2) 28 nm bulk MOSFET, 45 nm and 28 nm high-k gate SOI MOSFETs considering TID effects.
In book
Вып. 4. , ИППМ РАН, 2020
50584562, D.A. Popov, Li B. et al., , in : Proceedings of the 3nd International Conference on Microelectronic Devices and Technologies (MicDAT 2020). : Barcelona : International Frequency Sensor Association (IFSA), 2020. Ch. 15. P. 31-34.
The simulation results received by mixed TCAD-SPICE modeling for linear energy transfer (LET), transient characteristics of voltages and currents in 0.24 um SRAM cells with SOI, DSOI and SELBOX structures in temperature range up to 300 °C were analyzed. It was shown that the fault tolerance of CMOS SOI SRAM cells can be increased when ...
Added: March 23, 2021
Petrosyants K. O., Kozhukhov M., Popov D., , in : 2019 IEEE 22nd International Symposium on Design and Diagnostics of Electronic Circuits & Systems (DDECS). : Cluj : IEEE, 2019. P. 1-4.
A special RAD-THERM version of TCAD subsystem based on Sentaurus Synopsys platform taking into account different types of irradiation (gamma-rays, neutrons, electrons, protons, single events) and external/internal heating effects was developed and validated to forecast the results of natural experiments, and help the designer on with reliability guarantee. The radiation- and temperature-induced faults were modeled ...
Added: May 31, 2019
Petrosyants K. O., Kharitonov I. A., Popov D., , in : Proceedings of IEEE East-West Design & Test Symposium (EWDTS’13). : Kharkov : Kharkov national university of radioelectronics, 2013. P. 312-315.
Single event upsets (SEU) produced by heavy ions in SOI CMOS SRAM cells were simulated using a mixed-mode approach, that is, two-dimensional semiconductor device simulation by TCAD tool coupled with circuit SPICE simulator. The effects of parasitic BJT and particle strike position on the SOI CMOS SRAM cells upset for transistor length scaling from 0.25 ...
Added: October 4, 2013
Popov D., В кн. : Международный форум «Микроэлектроника-2020». Школа молодых ученых. Сборник тезисов. Республика Крым, г. Ялта, 21-25 сентября 2020 г. : М. : МАКС Пресс, 2020. С. 227-229.
A mixed TCAD-SPICE simulation of the heavy ion impact into a SRAM on SOI CMOS transistors was carried out. The dependence of the threshold LET on temperature was investigated for three configurations of 0.24 μm SOI MOSFET: traditional SOI, Selective BOX and Double SOI. The radiation hardness of SRAM on Double SOI MOSFETs is significantly ...
Added: December 5, 2020
Petrosyants K. O., Popov D., Kozhukhov M., , in : 2017 International Workshop on Reliability of Micro- and Nano-Electronic Devices in Harsh Environment” (IWRMN-EDHE 2017). : Institute of Microelectronics of Chinese Academy of Sciences, 2017. P. 1-3.
Novel TСAD-rad models for the bipolar and MOSFET structures have been developed taking into account the effect of proton radiation on the basic physical parameters (τ, μ, S, Nit). The simulation results are in good agreement with experimental data. ...
Added: October 16, 2017
Petrosyants K. O., Kozhukhov M., Popov D., Sensors and Transducers 2018 Vol. 227 No. 11 P. 42-50
The special library of radiation damage models for physical parameters and electrical characteristics of bipolar and MOS transistor and sensor structures taking into account neutron, gamma and proton irradiation is developed and built-into Sentaurus Synopsys software tool. For different BJTs/HBTs, MOSFETs and radiation sensors the good agreement to simulated and experimental electrical characteristics is achieved. ...
Added: October 22, 2018
Petrosyants K. O., Kharitonov I. A., Popov D., В кн. : Твердотельная электроника. Сложные функциональные блоки РЭА: Материалы XV научно-технической конференции, 27-29 сентября 2017. : М., Дубна : ОАО НПП «ПУЛЬСАР», 2017. С. 224-226.
С помощью Synopsys TCAD проводилось моделирование тока стока n-канального КНИ МОП-транзистора при воздействии ионизирующего излучения и повышении температуры от 27°С до 160°С. Показано, что полный ток утечки стока при повышенной температуре существенно выше суммы теплового тока необлученного транзистора и радиационного тока утечки при комнатной температуре. ...
Added: October 18, 2017
Popov D., Kharitonov I. A., В кн. : Фундоментальная наука и технология - перспективные разработки/ Fundamental science and technology - promising developments III. Т. 3. Вып. III.: CreateSpace, 2014. С. 4-6.
В статьи рассмотрено смешанной TCAD-SPICE моделирование воздействия одиночной заряженной частицы на ячейку памяти, состоящей из КМОП КНИ МОПТ с длиной канала 0.25 мкм. Моделирование производилось при различных температурах окружающей среды (от -100 С до 180 С). Показана важность учета влияния температуры на устойчивость ячеек памяти к сбоям, вызываемым воздействием отдельных тяжелых частиц, т.к. стойкость при повышенной ...
Added: June 5, 2014
Petrosyants K. O., Denis S. Silkin, Popov D., Micromachines 2022 Vol. 13 No. 8 Article 1293
A complete comparison for 14 nm FinFET and NWFET with stacked nanowires was carried out. The electrical and thermal performances in two device structures were analyzed based on TCAD simulation results. The electro-thermal TCAD models were calibrated to data measured on 30–7 nm FinFETs and NWFETs. The full set of output electrical device parameters Ion, ...
Added: October 30, 2022
Petrosyants K. O., Popov D., Известия высших учебных заведений. Электроника 2018 Т. 23 № 5 С. 521-525
КНИ МОП-транзисторы имеют худшие условия для отвода тепла из рабочей об-ласти, что негативно сказывается на надежности и производительности микро-схем. С помощью TCAD-моделирования исследован эффект саморазогрева в структурах КНИ МОП-транзистора с различной конфигурацией скрытого оксида: традиционная структура на объемном кремнии, структура кремний на изоляторе, структура с «окном» в скрытом оксиде (SELBOX), КНИ-структура с неполным скрытым оксидом ...
Added: October 22, 2018
Konstantin O. Petrosyants, Popov D., , in : 2nd International Conference on Modeling Identification and Control. MIC 2015. Vol. 119.: P. : Atlantis Press, 2015. P. 174-176.
The models of electro-physical effects built-into Sentaurus TCAD have been tested. The models providing an adequate modeling of deep submicron high-k MOSFETs have been selected. The gate and drain leakage currents for 45 nm MOSFET with PolySi gate and SiO2, SiO2/HfO2 and HfO2 gate dielectrics have been calculated using TCAD. It has been shown that ...
Added: February 20, 2016
Petrosyants K. O., Popov D., Известия высших учебных заведений. Электроника 2013 № 4 С. 96-97
For the correct accounting of joint effects of radiation and temperature on characteristics of MOSFETs with the help of TCAD system the nonlinear correction coefficient which considers change of concentration of traps from temperature is entered into model of traps volume density in oxide. ...
Added: October 6, 2013
Petrosyants K. O., Силкин Д. С., Popov D. et al., Известия высших учебных заведений. Электроника 2023 Т. 28 № 6 С. 826-837
С уменьшением размеров транзисторов возникают условия, когда удар одной частицы затрагивает сразу несколько транзисторов в составе ячейки памяти. Вследствие этого при моделировании недостаточно учитывать один транзистор, в который непосредственно попадает частица. В работе рассмотрена полноразмерная 3D-модель двух n-канальных транзисторов, являющихся частью 6T-ячейки памяти, в которую ударяет заряженная частица. Предложен способ моделирования удара частицы, который позволяет ...
Added: January 11, 2024
Petrosyants K. O., Кожухов М. В., В кн. : Труды XXV Международной конференции "Радиационная физика твердого тела" (Севастополь, 6-11 июля 2015г.). : М. : ФГБНУ "НИИ ПМТ", 2015. С. 415-423.
В работе была представлена физическая модель для SiGe ГБТ, которая описывает изменение базового тока в результате облучения потоком протонов. ...
Added: February 20, 2016
Petrosyants K. O., Popov D., Bykov D., Известия высших учебных заведений. Электроника 2017 Т. 22 № 6 С. 569-581
В работе моделируется воздействие ионизирующего излучения на 45 нм МОП-транзисторы с high-k диэлектриком, изготовленные по технологии на объёмном кремнии и диэлектрической подложке. Разработан и введен набор новых полуэмпирических моделей, учитывающих деградацию радиационно-зависимых параметров от воздействия ионизирующего излучения: подвижность, время жизни, зависимость плотности заряда в объеме SiO2 и HfO2 и на границах HfO2/Si от дозы ионизирующего излучения. ...
Added: October 16, 2017
Petrosyants K. O., Popov D., , in : Proceedings of the 2nd International Conference on Microelectronic Devices and Technologies (MicDAT '2019). : Barcelona : International Frequency Sensor Association (IFSA), 2019. P. 24-28.
In this work self-heating effect in SOI MOSFETs with various configuration of buried oxide was investigated using TCAD modeling. The basically electro-thermal transport model built-in to Sentaurus Synopsys tool was complemented by the set of new models for the temperature-dependent physical parameters: thermal conductivities λSi(T), λSiO2(T); oxide and trapped charge densities Nox(T), Nit(T) and others ...
Added: June 4, 2019
Petrosyants K. O., Kozhukhov M., Popov D., Наноиндустрия 2018 № 82 С. 404-405
The paper considers a new TCAD Rad model for BJTs and MOSFETs for proton radiation. The equations for radiation-dependent parameters (life time, mobility, surface velocity, traps concentration) have been added in Sentaurus TCAD. The simulation results are in good agreement with experimental data. ...
Added: January 30, 2019
Petrosyants K. O., Popov D., , in : 2017 International Workshop on Reliability of Micro- and Nano-Electronic Devices in Harsh Environment” (IWRMN-EDHE 2017). : Institute of Microelectronics of Chinese Academy of Sciences, 2017. P. 1-3.
TID response of 45nm high-k bulk and SOI MOSFETs was of simulated. The set of new physical semi-empirical models accounting for TID dependences trap densities, carrier mobilities, carrier lifetime was developed and introduced into TCAD. Acceptable agreement between simulated results and experimental data was achieved. ...
Added: October 16, 2017
Petrosyants K. O., Popov D., Russian Microelectronics 2019 Vol. 48 No. 7 P. 467-469
SOI MOSFETs have the worst properties of heat removal from an active region, which negatively
affects the reliability and efficiency of integrated circuits. Using TCAD modeling, we investigate the self-heating
effect in the following structures of deeply submicron MOSFETs with different configurations of buried
oxide: traditional bulk MOSFET, SOI structure, SELBOX structure, partial SOI structure, thin-BOX SOI
structure, UTBB ...
Added: March 24, 2020
50584562, Popov D., Bykov D., Russian Microelectronics 2018 Vol. 47 No. 7 P. 487-493
The sub-100-nm CMOS process with a high-κ gate dielectric is one of the key technologies for the
fabrication of digital, analog, and RF VLSI circuits and on-chip systems. The influence of ionizing radiation
on 45-nm MOS transistors with a high-κ dielectric fabricated using the bulk-silicon and SOI technologies is
simulated. Effects induced by the substitution of SiO2 with ...
Added: January 30, 2018
Petrosyants K. O., Orekhov E. V., Kharitonov I. A. et al., , in : International Conference “Micro- and Nanoelectronics – 2012” Book of abstracts. : M. : ФТИАН, 2012. P. P1-08.
3D device simulations accounting for self-heating effects in bulk silicon and SOI n-MOSFET’s with 0.1 um gate size were performed. The temperature distribution in the transistors channels and the maximum operation temperature were acquired. The self-heating effect in the SOI MOSFET with different active silicon film thickness was investigated. ...
Added: January 11, 2013
Petrosyants K. O., Kozhukhov M., Popov D., В кн. : Международный форум "Микроэлектроника-2017" 3-я Международная научная конференция "Электронная компонентная база и электронные модули". Республика Крым, г. Алушта, 02-07 октября 2017 г. : М. : Техносфера, 2017. С. 344-347.
Разработана новая TCAD Rad модель для биполярных и МОП транзисторов, учитывающая влияние протонов на основные радиационно-зависимые параметры, такие как время жизни, подвижность, скорость поверхностной рекомбинации и концентрация радиационно-индуцированных ловушек в оксиде. Результаты моделирования показывают хорошую сходимость с экспериментальными данными. ...
Added: October 18, 2017
Petrosyants K. O., Popov D., Bykov D., Journal of Physics: Conference Series 2019 Vol. 1163 P. 1-6
Quasi-3D model for calculation of radiation leakage currents in modern submicron SOI MOSFET structures is proposed. Instead of the fully 3D modeling is proposed to solve two tasks: 2D modeling of the traditional MOSFET cross-section and 3D modeling of the side parasitic transistor. The radiation-induced leakage current simulation in the 0.35 μm SOI MOSFET structure with ...
Added: October 22, 2018
50584562, Popov D., L. M. Sambursky et al., Russian Microelectronics 2016 Vol. 45 No. 7 P. 460-463
The models of electrophysical effects built-into Sentaurus TCAD have been tested. The models providing an adequate modeling of deep submicron high-k MOSFETs have been selected. The gate and drain leakage currents for 45 nm MOSFETs with polysilicon gate oxide and SiO2, SiO2/HfO2 and HfO2 gate dielectrics have been calculated using TCAD. It has been shown ...
Added: March 2, 2017