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Regular version of the site

Article

Calculation of time-dependent flows of sputtered material in the asymmetric alternating current glow discharge

Vacuum. 2007. Vol. 81. No. 6. P. 771-773.
Bondarenko G.G., Bonk O. G., Kristya V. I.

Diffusion transport of material sputtered from the surface of the powered electrode in the asymmetric alternating current discharge is theoretically studied. It is shown that amplitudes of the non-stationary component of the sputtered atom (SA) flow densities at the electrodes depend on the discharge frequency and two dimensionless parameters, which are functions of the SA mass, its mean free path length in the background gas and the distance between the electrodes. It is found that diffusion damping of the time-varying component of the SA number density takes place in the discharge volume under certain conditions and their flows at the electrodes can be considered as time-independent.