Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures

Micromachines. 2024. Vol. 15. No. 1. Article 94.

Duleba A., Pugachev M., Mark Blumenau, Martanov S., Naumov M., Shupletsov A., Kuntsevich A.

Most 2D materials are unstable under ambient conditions. Assembly of van der Waals heterostructures in the inert atmosphere of the glove box with ex situ lithography partially solves the problem of device fabrication out of unstable materials. In our paper, we demonstrate an approach to the next-generation inert-atmosphere (nitrogen, <20 ppm oxygen content) fabrication setup, including optical contact mask lithography with a 2 μm resolution, metal evaporation, lift-off and placement of the sample to the cryostat for electric measurements in the same inert atmosphere environment. We consider basic construction principles, budget considerations, and showcase the fabrication and subsequent degradation of black-phosphorous-based structures within weeks. The proposed solutions are surprisingly compact and inexpensive, making them feasible for implementation in numerous 2D materials laboratories.

Keywords: metal films, lithography, nanofabrication technology, 2D materials, Van der waals heterostructures