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Mode Coupling in Electromechanical Systems: Recent Advances and Applications
Mode interactions have recently become the focus of intense research in micro/nanoelectromechanical systems (M/NEMS) due to their ability to improve device performance and explore the frontiers of fundamental physics. Understanding and controlling coupling between vibrational modes are critical for the development of advanced M/NEMS devices. This review summarizes the recent advances in studies of coupling between multiple modes in M/NEMS resonators, focusing especially on experimental developments and practical applications. First, depending on spatial distribution of interacting modes, this review divides the coupled mechanism in three types: intermode, near-neighbor, and longrange coupling. Then, several fundamental physics approaches based on mechanical-mode coupling, including linear and nonlinear coupling, modal localization, synchronization, and phonon manipulation are reviewed. This review also introduces sensing applications by using coupled mechanical modes. Finally, the state-of-the-art open questions and challenges are reviewed.