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  • Порометрия наноразмерных пленок рентгеновским методом
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October 19, 2026
'Cultural Studies Seeks to Understand What Lies Beneath the Surface of Everyday Things'
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October 14, 2026
At HSE University–St Petersburg, Experts Discuss How AI Changes Tourist Routes and Cultural Heritage
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Road Injuries Leading Cause of Death Among Men Aged 10 to 39
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Порометрия наноразмерных пленок рентгеновским методом

С. 211–211.
Novoselova E., Smirnov I. S., Monakhov I., Касьянов О. М.
The report presents the results of x-ray porosimetry of nanoscale films of polymethylphenylsiloxane.
Language: Russian
Full text
Keywords: наноразмерные пленкиporosimetrynanoscale filmsпорометрия

In book

Тезисы докладов Всероссийского совещания по использованию рассеяния нейтронов и синхротронного излучения в конденсированных средах (РНСИ-КС-2014)
СПб.: ФГБУ "ПИЯФ" НИЦ "Курчатовский институт", 2014.
Similar publications
Технология формирования и диагностика параметров растущих наноразмерных пленок
Smirnov I. S., Novoselova E., В кн.: Функциональные наноматериалы для космической техники. Труды 2-й Всероссийской школы-семинара студентов, аспирантов и молодых ученых.: М.: МИЭМ, 2011. С. 31–38.
The problems of determining the parameters of nanoscale films in real time of their formation by in-situ X-ray reflectivity were observed ...
Added: February 20, 2014
Применение метода in-situ рентгеновской рефлектометрии для определения параметров наноразмерных пленок кремния
Novoselova E., Smirnov I. S., Yegorov A. A. et al., В кн.: IX Международная конференция и VIII Школа молодых ученых «Кремний-2012». Книга тезисов.: СПб.: Научно-образовательный центр нанотехнологий РАН, 2012. С. 304–304.
В докладе приводятся описание созданной экспериментальной установки для напыления наноразмерных пленок различных материалов, а также результаты экспериментов по магнетронному напылению наноразмерных пленок кремния и других материалов на различные подложки. На основе экспериментальных данных выявлены границы применимости метода и требования к процессам напыления и условиям измерения. ...
Added: December 13, 2012
Рентгеновская рефлектометрия in situ. Возможности и ограничения
Yegorov A. A., Monakhov I., Novoselova E. et al., В кн.: Труды ХХII Международной конференции «Радиационная физика твердого тела» (Севастополь, 9-14 июля 2012 г.).: М.: ФГБНУ "НИИ ПМТ", 2012. С. 354–366.
We present experimental and calculated time dependences of parameters (density, surface roughness) for nanoscale films of carbon, aluminum and titanium. On the basis of these data the possibilities and limitations of the method of in situ X-ray reflectivity are demonstrated. ...
Added: December 13, 2012
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