Критерий качества в УФ – литографии
Given article contains an overview of recent works on methods of visualizing of the structures of automatic control systems. Some new algorithms are proposed: an algorithm for constructing a set of control units with an additional number of correction units in form of sets of transfer functions, the algorithm for the compatibility check of the generated sets, the algorithm of transition from a system of transfer functions to the list of incidence for further visualization. The article contains an example of proposed algorithms.
The questions of protecting from the vibrations objects are considered in control-diagnostic and technological equipment. Offered four level system of defence of objects of microelectronics from vibrations. For each of levels of the system the technological decisions of protecting from the vibrations devices are presented