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Влияние отжига на строение пленок ZnO, выращенных магнетронным распылением

Гл. 1. С. 156–159.
Налимов С. А., Шашин Д. Е., Yurin A.
Language: Russian
Text on another site
Keywords: nanofilmsнанопленкипленки ZnO

In book

Фундаментальные проблемы радиоэлектронного приборостроения: материалы Международной научно-технической конференции «INTERMATIC– 2018», 19–23 ноября 2018 г.
М.: Московский технологический университет (МИРЭА), 2018.
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