A mathematical model of ion and sputtered atom transport in the vicinity of the target with a periodical surface relief in glow discharge in pure gas is developed. Under the assumption that the relief amplitude is small, analytical expressions for their flows are found by the perturbation method and an equation describing the relief amplitude time evolution is derived. It is shown that intensity of sputtering exceeds intensity of sputtered material redeposition at the relief tops, and relief smoothing always takes place in the process of homogeneous target treatment in glow discharge in pure gas.
The scientific program of the conference Ion-Surface Interactions included the main aspects of this scientific discipline: ion scattering and penetration, sputtering and secondary ion emission, electron excitation, ion-induced electron, photon and X-ray emission, ion-assisted processes in thin films and nanostructures, radiation damage accumulation and plasma-surface interactions.
The sputtering of W-Cu composition by polyenergetic flux of hydrogen particles has been investigated. The experiments showed that the sputtering coefficients of the materials had abnormally high values in the experimental conditions.