• A
  • A
  • A
  • ABC
  • ABC
  • ABC
  • А
  • А
  • А
  • А
  • А
Regular version of the site

Article

Повышение равномерности нанесения тонких пленок в вакууме

Васин В. А., Ивашов Е. Н., Степанчиков С. В.

An actuating device complex motion mathematical model of automated vacuum processing equipment is developed. The model allows for controlling evenness of the thin filming aimed at improving its evenness. Manufacturing advantages of the coordinate actuating devices compared to planetary design are given, as well as main ways of controlling and improving vacuum thin film deposition evenness.