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Article

The influence of the discharge current axial component on the magnetic field distribution in the cathode region of magnetron sputtering system

Journal of Physics: Conference Series. 2017. Vol. 872. No. 1.
Goncharov V., Sorokin K., Fiskin E.

The paper includes the description of the mathematical model, which simulates magnetic field distribution in the cathode area of the sputtering system discharge considering the current created by electrons moving along the surface of cathode-target. Presented results of the numerical modeling were received using the developed model. It is also shown that the current component, directed along the cathode surface significantly impacts total magnetic field distribution in the magnetron discharge.