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Local laser oxidation of titanium film for the post-fabrication trimming of photonic integrated circuits

Optical Materials Express. 2022. Vol. 12. No. 10. P. 4072–4087.
TRONEV A., PARFENOV M., Bozhko S., Ionov A. M., SHAMRAI A.

Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies.

Research target: Physics
Language: English
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Keywords: процессprocessФотонные интегральные схемы (ФИС)Photonic integrated circuits (PICs)local laser oxidationлокальное лазерное окисление
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