• A
  • A
  • A
  • АБВ
  • АБВ
  • АБВ
  • A
  • A
  • A
  • A
  • A
Обычная версия сайта
  • RU
  • EN
  • HSE University
  • Publications
  • Articles
  • Функциональное моделирование процессов иммерсионной ультрафиолетовой литографии
  • RU
  • EN
Расширенный поиск
Высшая школа экономики
Национальный исследовательский университет
Priority areas
  • business informatics
  • economics
  • engineering science
  • humanitarian
  • IT and mathematics
  • law
  • management
  • mathematics
  • sociology
  • state and public administration
by year
  • 2027
  • 2026
  • 2025
  • 2024
  • 2023
  • 2022
  • 2021
  • 2020
  • 2019
  • 2018
  • 2017
  • 2016
  • 2015
  • 2014
  • 2013
  • 2012
  • 2011
  • 2010
  • 2009
  • 2008
  • 2007
  • 2006
  • 2005
  • 2004
  • 2003
  • 2002
  • 2001
  • 2000
  • 1999
  • 1998
  • 1997
  • 1996
  • 1995
  • 1994
  • 1993
  • 1992
  • 1991
  • 1990
  • 1989
  • 1988
  • 1987
  • 1986
  • 1985
  • 1984
  • 1983
  • 1982
  • 1981
  • 1980
  • 1979
  • 1978
  • 1977
  • 1976
  • 1975
  • 1974
  • 1973
  • 1972
  • 1971
  • 1970
  • 1969
  • 1968
  • 1967
  • 1966
  • 1965
  • 1964
  • 1963
  • 1958
  • More
Subject
News
May 22, 2026
HSE Graduates AI Project Wins at TECH & AI Awards
Daria Davydova, graduate of the HSE Graduate School of Business and Head of the AI Implementation Unit at the Artificial Intelligence Department of Alfa-Bank, received a prize at the TECH & AI Awards. She was awarded for the best AI solution for optimising business processes. The winners were determined as part of the VII Russian Summit and Awards on Digital Transformation (CDO/CDTO Summit & Awards).
May 20, 2026
HSE University Opens First Representative Office of Satellite Laboratory in Brazil
HSE University-St Petersburg opened a representative office of the Satellite Laboratory on Social Entrepreneurship at the University of Campinas in Brazil. The platform is going to unite research and educational projects in the spheres of sustainable development, communications and social innovations.
May 18, 2026
The 'Second Shift' Is Not Why Women Avoid News
Women are more likely than men to avoid political and economic news, but the reasons for this behaviour are linked less to structural inequality or family-related stress than to personal attitudes and the emotional perception of news content. This conclusion was reached by HSE researchers after analysing data from a large-scale survey of more than 10,000 residents across 61 regions of Russia. The study findings have been published in Woman in Russian Society.

 

Have you spotted a typo?
Highlight it, click Ctrl+Enter and send us a message. Thank you for your help!

Publications
  • Books
  • Articles
  • Chapters of books
  • Working papers
  • Report a publication
  • Research at HSE

?

Функциональное моделирование процессов иммерсионной ультрафиолетовой литографии

МГОУ-XXI - Новые технологии. 2012. № 2. С. 9–16.
Балан Н. Н., Vasin V. A., Ivashov E., Костомаров П. С., Stepanchikov S. V.
Priority areas: engineering science
Language: Russian
Full text
Keywords: автоматизированное проектированиеfunctional modelingфункциональное моделированиеиммерсионная ультрафиолетовая литографияcomputer-aided designimmersion ultraviolet lithographyimage device on substrateустройство формирования изображения на подложке
Similar publications
Perovskite nanoparticles Cs4PbBr6 and CsPbBr3: synthesis, analysis and peculiar optical properties
Гущина В. А., / Series chemrxiv-2023-vpzhz-v2 "ChemRxiv". 2023.
All-inorganic perovskite CsPbBr3 and Cs4PbBr6 nanoparticles are being intensively studied due to their unique properties and wide range of applications; however, however, the nature of their optical properties is not yet fully understood due to the difficulty of synthesis of singlephase nanoparticles. In this article we describe the features of the synthesis of single-phase particles ...
Added: May 14, 2026
Ising models on the hydrogen peroxide and other lattices
Qin X., Deng Y., Shchur L. et al., / Series arXiv "math". 2026. No. 2603.02962.
We perform a Monte Carlo analysis of the Ising model on many three-dimensional lattices. By means of finite-size scaling we obtain the critical points and determine the scaling dimensions. As expected, the critical exponents agree with the three-dimensional Ising universality class for all models. The irrelevant field, as revealed by the correction-to-scaling amplitudes, appears to ...
Added: April 20, 2026
Algorithmic overlaps as thermodynamic variables: from local to cluster Monte Carlo dynamics in critical phenomena
Pilé I., Deng Y., Shchur L., / Series arXiv "math". 2026. No. 2604.10254.
We investigate the spatial overlap of successive spin configurations in Markov chain Monte Carlo simulations using the local Metropolis algorithm and the Svendsen-Wang and Wolff cluster algorithms. We examine the dynamics of these algorithms for two models in different universality classes: the Ising model and the Potts model with three components. The overlap of two ...
Added: April 20, 2026
Determining the boundary of dynamical chaos in the generalized Chirikov map via machine learning
Chernyshov D., Satanin A., Shchur L., / Series arXiv "math". 2025.
We investigate the boundary separating regular and chaotic dynamics in the generalized Chirikov map, an extension of the standard map with phase-shifted secondary kicks. Lyapunov maps were computed across the parameter space (K,K(α, τ)) and used to train a convolutional neural network (ResNet18) for binary classification of dynamical regimes. The model reproduces the known critical ...
Added: November 21, 2025
Проектирование в электронной инженерии: комплексное моделирование физических процессов телекоммуникационных устройств
Sotnikova S., М.: Грифон, 2024.
В данной монографии изложены основы и современные возможности компьютерного моделирования при проектных исследованиях комплекса разнородных процессов: электрических, тепловых, механических и пр., – которые, как правило, одновременно протекают в телекоммуникационных устройствах систем связи и управления подвижными объектами. Научные положения монографии содержатся при каждом описании теории построения моделей на основе комплексного подхода к проектированию телекоммуникационных устройств, а также ...
Added: January 31, 2025
Doping dependence of low-energy charge collective excitations in high-Tc cuprates
Kagan M., Silkin V. M., Efremov D. V., / Series arXiv "math". 2024. No. 2411.12836.
In this study, we analyze the dielectric function of high-Tc cuprates as a function of doping level, taking into account the full energy band dispersion within the CuO2 monolayer. In addition to the conventional two-dimensional (2D) gapless plasmon mode, our findings reveal the existence of three anomalous branches within the plasmon spectrum. Two of these branches ...
Added: November 27, 2024
Influence of anisotropy on the study of critical behavior of spin models by machine learning methods
Sukhoverkhova D., Shchur L., / Series arXiv "math". 2024. No. 2410.14523.
In this paper, we applied a deep neural network to study the issue of knowledge transferability between statistical mechanics models. The following computer experiment was conducted. A convolutional neural network was trained to solve the problem of binary classification of snapshots of the Ising model's spin configuration on a two-dimensional lattice. During testing, snapshots of ...
Added: October 21, 2024
«Живые артефакты»: перспективы развития цифровых технологий в биодизайне
Дьяченкова О. В., Международный журнал исследований культуры 2025 Т. 58 № 1 С. 6–17
Biodesign is the new industrial paradigm for material artifacts of the 21st century. This new design practice involves the integration of living organisms such as bacteria, microalgae, fungi and plants into design as sources of materials, generators of energy and food, sources of light, purifiers of water and air, regulators of heat, etc. Today, biodesign ...
Added: September 12, 2024
Comparison of the microcanonical population annealing algorithm with the Wang-Landau algorithm
Mozolenko V., Fadeeva Marina, Shchur L., / Series arXiv "math". 2024. No. 2405.10865.
The development of new algorithms for simulations in physics is as important as the development of new analytical methods. In this paper we present a comparison of the recently developed microcanonical population annealing (MCPA) algorithm with the rather mature Wang-Landau algorithm. The comparison is performed on two cases of the Potts model exhibiting a first ...
Added: May 20, 2024
Majorana modes and Fano resonances in Aharonov- Bohm ring with topologically nontrivial superconducting bridge
Kagan M., Аксёнов С. В., / Series Research Square "Research Suqare". 2024. No. 1.
We study different resonances (first of all of the Fano type) in the interference device formed by the Aharonov-Bohm ring with superconducting (SC) wire in the topologically nontrivial state playing a role of a bridge between top and bottom arms. We analyze Majorana modes on the ends of the SC wire and show that the collapse of the ...
Added: April 10, 2024
High-frequency dielectric anomalies in a highly frustrated square kagome lattice nabokoite family compounds ACu7(TeO4)(SO4)5Cl (A=Na, K, Rb, Cs)
Ребров Я. В., Glazkov V., Murtazoev A. F. et al., / Series cond-mat "arxiv.org". 2023.
Nabokoite family compounds ACu7(TeO4)(SO4)5Cl (A=Na, K, Cs, Rb) are one of the candidates for the evasive spin-liquid state predicted for highly-frustrated square kagome lattice (SKL). Their magnetic subsystem includes SKL layers decorated by additional copper ions. All members of this family are characterized by quite high Curie-Weiss temperatures (∼80−200 K), but magnetic ordering was reported ...
Added: January 29, 2024
Nondestructive KPFM-assisted Quality Control in Fabrication of GaAs High-Speed Electronics
Shurakov A., Kaurova N., Belikov I. et al., / Series Physics "arxiv.org". 2022.
In this paper, we report on the method of nondestructive quality control that can be used in fabrication of GaAs high-speed electronics. The method relies on the surface potential mapping and enables rigid in vivo analysis of transport properties of an active electronic device incorporated into a complex integrated circuit. The study is inspired by ...
Added: September 15, 2023
Superconducting spin valves based on a single spiral magnetic layer
Pugach N., Safonchik M. O., Belotelov V. et al., / Series "cond-mat". 2022. No. 2110.00369.
A detailed investigation of a superconducting spin-triplet valve is presented. This spin-valve consists of a superconducting film covering a metal with an intrinsic spiral magnetic order, which could result from competing isotropic exchanges or, if the crystal lattice breaks central symmetry, from asymmetric Dzyaloshinskii-Moriya exchange. Depending on the anisotropy, such a metal may change its ...
Added: November 16, 2022
Charge transport in the spatially correlated exponential random energy landscape: effect of the non-positive correlation function
Novikov S. V., / Series cond-mat "arxiv.org". 2022. No. 2209.14955.
Charge transport in amorphous semiconductors having spatially correlated exponential density of states (DOS) has been considered for the arbitrary behavior of the correlation function of random energies. Average carrier velocity is exactly calculated for the quasi-equilibrium (nondispersive) transport regime. For the symmetric exponential DOS with exponential tails for low and high energies and non-positive correlation ...
Added: November 1, 2022
Structural and functional modeling of processes with a dedicated control subject
Mylnikov L., Automatic Documentation and Mathematical Linguistics 2022 Vol. 56 No. 1 P. 42–54
The efficiency of informational support depends on the speed and quality of making management decisions, as well as their relevance and adaptability to changing conditions, which determine the efficiency of the functioning of production systems. The paper considers the development of artifacts to represent struc- tural and functional models of organizational systems described by the ...
Added: October 6, 2022
Software Complex for the Numerical Solution of the Isotropic Imaginary-Axis Eliashberg Equations
Ikhsanov R., Mazur E., Kagan M., / Series "Working papers by Cornell University". 2022. No. 2202.01452.
At present, the task of searching for compounds with a high superconducting transition temperature is a very relevant scientific direction. Usually, the calculation of is carried out by numerically solving the system of Eliashberg equations. In this paper, a set of programs for solving this system written in various forms on the imaginary axis is ...
Added: February 4, 2022
Theory of Ionic Liquids with Polarizable Ions on a Charged Electrode
Budkov Y., Zavarzin S., Kolesnikov A. L., Journal of Physical Chemistry C 2021 Vol. 125 No. 38 P. 21151–21159
We formulate a general mean-field theory for a flat electric double layer in ionic liquids and electrolyte solutions with ions possessing static polarizability and a permanent dipole moment on a charged electrode. We establish a new analytical expression for electric double-layer differential capacitance, determining it as an absolute value of the ratio of the local ...
Added: September 16, 2021
Synthesis, structure, and PDE inhibiting activity of the anionic DNIC with 5-(3-pyridyl)-4H-1,2,4-triazole-3-thiolyl, the nitric oxide donor.
Sanina N., Isaeva U., Utenyshev A. et al., Inorganica Chimica Acta 2021 Vol. 527 Article 120559
A new inhibitor of phosphodiesterase (PDE), i.e., nitric oxide (NO) donor, a water soluble DNIC Na[Fe(C7H5N4S)2(NO)2]⋅2.5H2O (1), has been synthesized. The structure of the new complex, its physical-chemical properties in the solid state and in solutions have been studied experimentally (X-ray analysis, IR, UV-Vis, Mossbauer spectroscopy, mass-spectrometry, and amperometry) and theoretically (quantum-chemical modeling by DFT ...
Added: September 16, 2021
Импорт данных из САПР Altium Designer в систему АСОНИКА-К-СЧ для автоматизации исследований надежности радиоэлектронных средств
Zhadnov V. V., Зотов А. Н., Вестник компьютерных и информационных технологий 2020 Т. 17 № 6 С. 31–41
This article discusses problems of importing data from system of CAD (Computer-Aided Design) to dependability prediction software. Characteristics of dependability of electronic modules to a large extent define reliability of electronic equipment which contains them. Dependability of electronic modules is established on the early stages of engineering and is usually calculated by special software. Obviously, ...
Added: May 31, 2020
Тезисы докладов. XXI Научно-технической конференции молодых ученых и специалистов. Том 2
Королев: ПАО "РРК "Энергия им. С.П. Королева", 2017.
Collection of theses of reports. XXI Scientific and technical conference of young scientists and experts. In 2 Volumes. In sixteen sections 327 reports on scientific research, design and methodical developments, experimental works and also works on creation and introduction have been presented to improvement of methods of management and the organization of developments to production of ...
Added: February 26, 2018
Method of increasing the reliability of on-board electronic equipment with an analysis of reserves for the electrical, thermal and mechanical loads
Kofanov Y. N., Sotnikova S., Subbotin S. A., , in: Proceedings of the 2016 IEEE Conference on Quality Management, Transport and Information Security, Information Technologies (IT&MQ&IS-2016).: St. Petersburg: IEEE, 2016. P. 94–98.
The paper is discussing a method of increasing the reliability of on-board electronic equipment at the early stages of its design. Authors offer to evaluate and provide deterministic reserves for thermal, mechanical and electrical loads to electronic components using special simulation software. Determinacy of reserves loads on the electronic components is achieved by a result ...
Added: December 10, 2016
Увеличение эффективности проектирования с использованием непараметрических методов обработки информации
Ivashov E., Yagovtsev V., В кн.: Фундаментальные проблемы радиоэлектронного приборостроения: Материалы международной научно-технической конференции INTERMATIC-2015Ч. 3: Материалы и технологии.: М.: Редакционно-издательский отдел МИРЭА, 2015. С. 213–215.
При автоматизированном проектировании элементов, узлов и устройств технологического оборудования разработчик встречается с проблемой малых выборок, т.е. отсутствия необходимого количества эмпирических данных для принятия рационального конструктивно-технологического решения. ...
Added: December 6, 2015
Технологии углеродных материалов и структур в наноинженерии
Воротилов К. А., Ivashov E., Кузнецов П. С. et al., М.: Редакционно-издательский отдел МИРЭА, 2015.
Рассмотрены некоторые вопросы информационных технологий проектирования в микро- и наноинженерии, в частности формирование углеродных нанообъектов в тонкоплёночных структурах, автоматизированное проектирование процесса получения углеродных нанотрубок и фуллеренов, моделирование процесса управления качеством электронных устройств, функциональное моделирование системы менеджмента качества, математическое моделирование управления качеством электронных устройств на основе углеродных структур. Учебное пособие рекомендовано студентам вуза, обучающимся по направлениям: 210100 ...
Added: November 4, 2015
Стратегия технического обслуживания систем управления
Болнокин В. Е., Ivashov E., Костомаров П. С. et al., Вестник машиностроения, СТИН 2015 № 7 С. 3–5
The policy of maintenance support of a complicated engineering system, providing the maximum effectiveness of its service, is considered. The solved optimization problem of integer programming allows combining the structural elements of a project into groups, optimal from the position of minimization of inter-group connections. ...
Added: September 23, 2015
  • About
  • About
  • Key Figures & Facts
  • Sustainability at HSE University
  • Faculties & Departments
  • International Partnerships
  • Faculty & Staff
  • HSE Buildings
  • HSE University for Persons with Disabilities
  • Public Enquiries
  • Studies
  • Admissions
  • Programme Catalogue
  • Undergraduate
  • Graduate
  • Exchange Programmes
  • Summer University
  • Summer Schools
  • Semester in Moscow
  • Business Internship
  • Research
  • International Laboratories
  • Research Centres
  • Research Projects
  • Monitoring Studies
  • Conferences & Seminars
  • Academic Jobs
  • Yasin (April) International Academic Conference on Economic and Social Development
  • Media & Resources
  • Publications by staff
  • HSE Journals
  • Publishing House
  • iq.hse.ru: commentary by HSE experts
  • Library
  • Economic & Social Data Archive
  • Video
  • HSE Repository of Socio-Economic Information
  • HSE1993–2026
  • Contacts
  • Copyright
  • Privacy Policy
  • Site Map
Edit