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Исследование строения и свойств пленок углеродных и алмазоподобных материалов
С. 256–260.
Налимов С. А., Yurin A.
Experimentally investigated the films of carbon and diamond-like materials (AlN) with an ordered structure of the crystal phase, grown by plasma methods on the substrates of amorphous and crystalline materials in order to form multilayer structures. The influence of technological parameters on the composition, structure and functional characteristics of the layers is studied.
Language:
Russian
In book
М.: Ассоциация выпускников и сотрудников ВВИА им. проф. Жуковского, 2018.