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Расчет распыления электрода с диэлектрической пленкой на поверхности в тлеющем разряде
С. 74–78.
In book
М.: ФГБНУ "НИИ ПМТ", 2014.
Zheltukhin V. S., Kiselev G. B., A. Yu. Shemakhin et al., High Energy Chemistry 2025 Vol. 59 No. 2 P. 207–214
A non-invasive voltage standing wave ratio (VSWR) method for electron density measurement in
the surface layer of mercury plasma glow discharge is studied. The method is based on determination of resonant frequencies between the plasma layer and the radio frequency signal by the unit standing wave ratio
(SWR) combined with the calculation of the dielectric permittivity and ...
Added: February 25, 2026
Schmitz A., Hanstein L., Klein M. et al., Microgravity Science and Technology 2025 Vol. 37 Article 7
In this work we present an experiment in which we injected microspheres at low pressure into a capacitively coupled argon plasma chamber. The setup was located in the top point of the Einstein-Elevator drop tower in Hannover, Germany, where the microparticles reached their equilibrium position above the lower electrode during 1 g. During the fall, ...
Added: February 25, 2026
Bondarenko G., Fisher M. R., Kristya V. I., Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques 2025 Vol. 19 No. 1 P. 66–72
A model of a cathode layer in a gas glow discharge is formulated taking into account the presence
of a dielectric film with varying thickness on the cathode across different areas of its surface, and in some
areas, the film may be absent. The model includes ion–electron emission from the cathode surface, thermalfield
electron emission from the cathode ...
Added: June 11, 2025
Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films
Alktash N., Ruslan Muydinov, Erfurt D. et al., Review of Scientific Instruments 2023 Vol. 94 No. 7 Article 075104
Gas flow sputtering is a sputter deposition method that enables soft and high-rate deposition even for oxides or nitrides at high pressure (in the mbar range). A unipolar pulse generator with adjustable reverse voltage was used to optimize thin film growth by the hollow cathode gas flow sputtering system. In this regard, we describe our ...
Added: September 19, 2024
Bondarenko G., Кристя В. И., Савичкин Д. О. et al., Поверхность. Рентгеновские, синхротронные и нейтронные исследования 2024 № 3 С. 81–87
Предложена модель слаботочного газового разряда в смеси аргона и паров ртути при наличии
на поверхности катода тонкой диэлектрической пленки. Модель учитывает, что в такой смеси
существенный вклад в ионизацию рабочего газа может давать ионизация атомов ртути при их
столкновениях с метастабильными возбужденными атомами аргона. В разряде на поверхности
пленки накапливаются положительные заряды, создающие в диэлектрике электрическое поле,
достаточное для возникновения ...
Added: June 12, 2024
Masalovich M., Zagrebelnyy O., Nikolaev A. et al., Electrochimica Acta 2022 Vol. 410 Article 139999
Composite electrodes based on cobalt hydroxide and iron oxide, respectively, with silica as an under-layer were
developed with the use of sol-gel and electrochemical deposition techniques. The electrodes demonstrate similar
surface morphologies of the upper pseudocapacitive layer formed by lamellas. The composite Co-based electrodes
as well as Fe-based electrodes with silica reveal higher values of capacitance retention after ...
Added: December 5, 2022
Bondarenko G.G., Kristya V. I., Myo T. H. et al., Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques 2022 Vol. 16 No. 4 P. 581–585
A model of glow gas discharge in the presence of a thin insulating film on the cathode is formulated.
It takes into account, along with ion-induced secondary electron emission from the cathode surface,
also the thermal-field emission of electrons from the cathode metal substrate into the film under a strong
electric field generated in the insulator when the ...
Added: August 3, 2022
Модель термополевой электронной эмиссии из катода с тонкой диэлектрической пленкой в тлеющем разряде
Bondarenko G., Кристя В. И., Мьо Т. Х. et al., В кн.: Труды XXV Международной конференции «Взаимодействие ионов с поверхностью" (ВИП-2021)Т. 3: Взаимодействие плазмы с поверхностью - физика и технология.: М.: [б.и.], 2021. С. 86–89.
Added: September 21, 2021
Бондаренко Г.Г., Кристя В. И., Мью Т. Х. et al., В кн.: Труды XXXI Международной конференции «Радиационная физика твердого тела» (Севастополь, 5 - 10 июля 2021 г.).: ФГБНУ "НИИ ПМТ", 2021. С. 159–164.
Added: July 22, 2021
National Research Nuclear University «MEPhI», 2017.
The scientific program of the conference Ion-Surface Interactions included the main aspects of this scientific discipline: ion scattering and penetration, sputtering and secondary ion emission, electron excitation, ion-induced electron, photon and X-ray emission, ion-assisted processes in thin films and nanostructures, radiation damage accumulation and plasma-surface interactions. ...
Added: August 31, 2017
Bondarenko G., Дубинина М. С., Кристя В. И. et al., В кн.: Труды XXVII Международной конференции "Радиационная физика твердого тела" (Севастополь,10-15 июля 2017 г.), под редакцией д.ф.-м.н., проф.Бондаренко Г.Г. М.: ФГБНУ "НИИ ПМТ", 2017, 522 с.: М.: ФГБНУ "НИИ ПМТ", 2017. С. 41–46.
В данной работе с использованием предложенной модели слаботочного разряда определены вклады различных типов межчастичных взаимодействий в поддержание баланса основных типов частиц как функции относительного содержания ртути в смеси аргон-ртуть. ...
Added: August 22, 2017
Bondarenko G.G., Kristya V. I., , in: IOP Conference Series: Materials Science and Engineering. XII International Conference Radiation-thermal Effects and Processes in Inorganic Materials. 4–12 September 2016, Tomsk, Russian FederationТ. 168.: Бристоль: IOP Publishing, 2017. P. 012008-1–012008-5.
An approximate analytical expression for the ion current density near the cathode in glow discharge is obtained in the presence of a periodic relief of small amplitude and an insulating oxide film of varying thickness on its surface. It is found that ion focusing at the cathode sections with the minimum film thickness, located on ...
Added: April 26, 2017
Bondarenko G., Кристя В. И., Савичкин Д. О., Известия высших учебных заведений. Физика 2017 Т. 60 № 2 С. 129–134
Построена теоретическая модель катодного слоя нормального тлеющего разряда при наличии на поверхности катода тонкой диэлектрической пленки. В ней, кроме ионно-электронной эмиссии, учитывается также полевая эмиссия электронов из металлической подложки катода в пленку под действием возникающего в диэлектрике сильного электрического поля. Установлено, что влияние полевой электронной эмиссии на характеристики тлеющего разряда определяется эмиссионной эффективностью пленки, равной ...
Added: April 6, 2017
Bondarenko G.G., Kristya V. I., IOP Conference Series: Materials Science and Engineering (MSE) 2017 Vol. 168 No. 012008 P. 1–5
An approximate analytical expression for the ion current density near the cathode in glow discharge is obtained in the presence of a periodic relief of small amplitude and an insulating oxide film of varying thickness on its surface. It is found that ion focusing at the cathode sections with the minimum film thickness, located on ...
Added: February 17, 2017
Bondarenko G.G., Kristya V. I., Tun Y. N., Russian Physics Journal 2016 Vol. 58 No. 9 P. 1313–1320
Special features of sputtering of the cathode with a thin dielectric film of variable thickness in a glow discharge are studied. It is shown that the flux density of atoms sputtered from the cathode is maximal on its sections with minimal film thickness due to focusing of ion flux caused by the violation of the ...
Added: January 21, 2016