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VACUUM DISCHARGE DRIVEN BY STRIPE LINE STORAGE AS A SOURCE OF EUV RADIATION
The article presents the discharge plasma based source of extreme ultraviolet (EUV) radiation. The discharge circuit has been driven by means of stripe line storage with working voltage 10.5 kV. The main feature of the proposed source is that plasma electrons acquire the energy, necessary for the production of multiply charged ions with ionization potentials 100 – 200 eV, directly under the action of the electrical field, applied to plasma column. Low level of the electrodes erosion and comparatively short time of the discharge (300 400 ns) makes it possible to expect low level of debris. Plasma dynamics has been studied by means of simultaneous detection of EUV spectra and pin – hole camera images with the usage of microchannel plate (MCP) detectors, gating time 20 ns. Spatially resolved spectra with slit resolution demonstrated time evolution of EUV emitting zone. Four frame pin – hole camera with MCP detector allowed to estimate the velocity of axial plasma expansion as (2÷4)×106 cm/s for different anode materials.