• A
  • A
  • A
  • ABC
  • ABC
  • ABC
  • А
  • А
  • А
  • А
  • А
Regular version of the site

Book chapter

Нанесение титановых пленок на стеклянные подложки с использованием установки Плазменный Фокус "ПФ-4"

С. 164-164.
Ерискин А. А.

There are many different methods of deposition of films on the dielectric material and the metal surface , such as magnetron sputtering and thermal materials , methods, and electrolytic chemical deposition , etc. However , after the film deposition to improve their adhesion to the substrate is necessary to apply chemical and thermal treatment, which often leads to uncontrolled changes in the physical properties of the films . Thus, the search for alternative methods of deposition of films that do not require additional costs for thermal and galvanic chemical treatment remains valid . This paper proposes a method of applying metallic films on glass substrates using pulsed plasma obtained by installing a Plasma Focus ; describe a scheme of the experiment and the results of investigations of the obtained films.