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Влияние отжига на оптические свойства пленок, полученных на установке “ПФ-4”
С. 225–226.
Eriskin A. A.
Investigated the effect of annealing on the optical properties of metallic films obtained by setting the plasma-focus "PF-4" on glass substrates. The transmission spectra of these films before and after annealing in air at about 900 K for about 10 minutes. Shows the effect of carbon on the optical properties and electrical conductivity of the films.
Keywords: плазменный фокусоптические свойстваconductivityfilm of titaniumplasma focusуглеродтонкие пленкиthin filmsтитанmetal coatingsметаллические покрытияэлектропроводность композитных покрытийannealingcarbonOptical properties of coatingsTititaniumотжигметаллические пленкиTi optical propertiesmetal filmstransmission spectrumelectrical conductivity of composite coatingsспектр пропускания
In book
М.: МИЭМ НИУ ВШЭ, 2014.
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Выполнены экспериментальные исследования базовых параметров пленок алюминия толщиной 150 nm
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испарения в диапазоне температур от 77 до 800K. Для охлаждения подложки до температуры жидкого азота
изготовлена вакуумная вставка в установку Z400, а для нагрева до 800K использован штатный нагреватель
установки Kurt Lesker. Установлено, что криогенное осаждение адатомов алюминия ...
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