Proceedings of the XXIII International Conference «Ion-Surface Interactions» ISI–2017 (Moscow, Russia, August 21-25, 2017). Moscow, National Research Nuclear University «MEPhI», 2017
The scientific program of the conference Ion-Surface Interactions included the main aspects of this scientific discipline: ion scattering and penetration, sputtering and secondary ion emission, electron excitation, ion-induced electron, photon and X-ray emission, ion-assisted processes in thin films and nanostructures, radiation damage accumulation and plasma-surface interactions.
In this work, a model describing the field emission of electrons from the electrode metal substrate into the insulating film, their motion in the film and going out of it into the dischargevolume is formulated. An analytical expression for the film emission efficiency is obtained and its dependence on the film parameters is studied.