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Regular version of the site

Article

Change in the properties of polyimide films under combined proton and oxygen plasma irradiation

Novikov L., Voronina E., Chernik V., Zhilyakov L.

The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 1014–1016 cm–2 and an oxygen plasma fluence of ~1020 cm–2. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented.