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MoRe superconducting nanowire single-photon detector atop of lithium niobate on insulator
We demonstrate an amorphous molybdenum–rhenium (MoRe) film on a thin-film lithium niobate substrate as an efficient superconducting nanowire single-photon detector (SNSPD) operating at T=2.5 K. MoRe films were deposited by DC magnetron sputtering with a composite target of 56 at. % Mo and 44 at. % Re on lithium niobate on insulator substrates at room temperature. We investigated the spectral and temporal performance of MoRe SNSPDs as well as the detection regimes of one and multiple photons. The fabricated detector with a nanowire width of about 150 nm shows an internal detection efficiency of approximately 98% and 73.5% for the most crucial wavelengths for integration on the chip, 780 and 1550 nm, respectively. Our results show great potential for the use of MoRe for scalable and cryogenic tunable quantum photonic integrated circuits.