Technological Sensor on Coupled Radial Spirals

IEEE Transactions on Electron Devices. 2020. Vol. 67. No. 3. P. 1165–1170.

Pchelnikov Y., Yelizarov (Elizarov) A. A.

We present the sensor with a sensitive element (SE) based on coupled radial spirals, which can be used for monitoring technological processes in the Electronic Industry, as well as for detecting damages on the pipelines under protective coatings. The main properties and characteristics of such SE are analyzed and measured.
It is shown that the concentration of the electromagnetic field in a measuring space, caused by slowing down of the
the wave, and splitting of the electric and magnetic fields leads to a significant increase in sensitivity, whereas the
multiple increases in the slowdown makes it possible to use the advantages of SE with distributed parameters at
relatively low operating frequencies. The practical realization of the described sensor is demonstrated in measuring
the ion implantation processes and the thickness of the metallization, as well as in monitoring the invisible cracks
and damages through the protective coats on the metal surfaces.

 

Keywords: electrodynamics, radial spirals, slow-wave structure, Pierce oscillator, sensitive element, slowdown, RF and microwave measurements

Publication based on the results of: Проектное исследование электродинамики волновых процессов в резонансных отрезках замедляющих систем и структурах с метаматериалами для совершенствования характеристик микроволновых частотно-селективных приборов и устройств (2019)