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Article

Виброзащита объектов микроэлектроники в контрольно-диагностическом и технологическом оборудовании

Контроль. Диагностика. 2009. № 1. С. 32-35.
Васин В. А., Ивашов Е. Н., Степанчиков С. В.

The questions of protecting from the vibrations objects are considered in control-diagnostic and technological equipment. Offered four level system of defence of objects of microelectronics from vibrations. For each of levels of the system the technological decisions of protecting from the vibrations devices are presented