Electrical characterization and reliability of submicron SOI CMOS technology in the extended temperature range (to 300 °C)
I-V characteristics and reliability parameters for the set of hardened SOIMOSFET'swith special layouts and tungsten metallization to provide additional thermal tolerance for high-temperature SOI CMOS IC's are investigated in the temperature range up to 300 °C. The reliability aspects under test for MOSFET's are threshold voltage shift, subthreshold slope and mobility degradation, gate leakage current rise; for tungsten metallization (contacts, conductor lines and vias) I-T and R-T characteristics, failure time. The SOI MOSFET standard compact SPICE model BSIMSOI with traditional temperature limit of 150 °C ismodified to be used for CMOS IC simulation in the extended temperature range up to 300 °C. The results indicate that the 0.5–0.18 μm SOI MOSFET's with tungsten metallization have stable electrical behavior that makes them possible to be used during implementation of HT CMOS IC's (to 300 °C).