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Article

Calculation of ion sputtering yield of solid sample with cylindrical cavities and rectangular trenches on the surface

Japanese Journal of Applied Physics. 2001. Vol. 40. No. 2B. P. 965-967.
Bondarenko G.G., Kristya V. I., Prassitski V. V.

Analytical expressions which determine the probability of sputtered atom escaping from a cylindrical cavity and a rectangular trench on the target surface bombarded by an ion beam are obtained for sputtered atoms cosine and over-cosine angle distributions. It is shown that the sputtering yield can be substantially reduced by creation a relief of cylindrical cavities on the sputtered surface.